Technical equipment

We offer you comprehensive services in failure analysis and material characterization. Combined in one hand to save time and money, led by a committed, service-focused team with extensive knowledge of material-related issues in microelectronics. What’s more, the facilities offered are first rate — within the Fraunhofer Gesellschaft, Fraunhofer IMWS has an extensive range of equipment for microstructural diagnosis.

Defect localization and non-destructive testing:

  • Nanoprobing and electron beam-based current mapping (EBIC, EBAC)
  • Emission microscopy
  • Lock-in thermography
  • Magnetic force microscopy
  • Acoustic microscopy (SAM, GHz-SAM)
  • 2D and 3D X-ray inspection

High-resolution material diagnostics and destructive testing:

  • Decapsulation of components and precision cross-sectioning
  • Rapid, high-performance chip and housing analysis with laser FIB and plasma FIB systems
  • Optical/IR spectroscopy (UV/VIS/FTIR and Raman)
  • High-resolution microstructure and interface analysis (combined FIB/SEM and SEM with X-ray analysis)
  • Nanoanalytics (TEM/STEM microscopes (60–300 kV) with image correction, HAADF, EDS, EELS), AFM
  • Surface- and trace-analysis (AFM, ToF-SIMS, XPS)
  • Mechanical characterization (nanoindentation and material testing at increased temperatures)
  • Thermomechanical deformation characterization (white light interferometry, laser triangulation, profilometry)
  • Residual stress analysis
  • Characterization of thermophysical properties

Modeling and simulation:

  • Finite-Element-Analysis (software tools: mechanical, thermo-mechanical and multi-physical simulation, acoustic simulation, implementation of optimization tools)
  • non-linear material behavior, microstructure-based analysis, fracture mechanics, material fatigue
  • Numerical, design optimization, robustness analyses
  • Numerical / experimental parameter identification for complex models

Mechanical/thermomechanical characterization:

  • Mechanical characterization (various tensile / pressure / bending test setups up to 500 °C)
  • Micromechanical characterization (design, generation and test of specific test structures, local characterization of bulk material, increased temperatures)
  • Nanoindentation (temperature-dependent, material mapping, nano-DMA)
  • Thermomechanical deformation analyses (white light interferometry, laser triangulation, profilometry)
  • Fracture mechanical parameter identification (bulk material / material interfaces)
  • Dynamic material characterization (cyclic tests, fatigue (LCF))
  • Dynamic measurement of vibrations (Laser-Doppler-Vibrometry)
  • Estimation of thermophysical material properties